The international system of units (SI) by International Bureau of Weights and Measures

By International Bureau of Weights and Measures

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21) with M I = me. The maximum energy transfer to the atomic nucleus is less than 2 eV for a 10 keV electron in silicon. Since the total amount of energy required to displace an atomic nucleus in silicon is approximately 20 eV, the displacement threshold electron energy is approximately 140 keV. An example of a measurement to determine the threshold electron displacement energy is given in Ref. 65. Even electrons with an energy greater than this only lose, on average, a small fraction of that energy in the production of displaced atomic nuclei.

The kinematic factor and scattering cross-section must be accurately known to interpret the measured spectrum of ion energies in backscattering spectrometry. They are tabulated in Refs. 15 to 17, and only the general trends are outlined here. When an ion of mass MI collides with an atomic nucleus of mass M2, energy is transferred to the nucleus. EAR ENERGY LOSS 13 retains all its energy except that lost making the nucleus recoil, and the lunematics of this elastic collision are defined by the conservation of energy and momentum.

13. J. Lindhard, Proc. Roy. Soc. Lond. A311:ll (1969). 14. E. Schiott, Interaction of Energetic Charged Particles with Solids, Brookhaven National Laboratory, Rept. BNL-50336 (1973). 15. K. W. A. Nicolet, Backscattering Spectrometry. Academic Press, New York (1978). 16. W. Mayer and E. , Ion Beam Handbook for Materials Analysi~,Academic Press, New York (1977). 17. C. W. Mayer, Fundamentals of Surface und Thin Film Analysis, North-Holland, Amsterdam (1986). 18. T. S. Oen, Proc. Con$ Le Bombardement Ionique, ed.

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