By Ludwig Reimer
Scanning Electron Microscopy provides an outline of the physics of electron-probe formation and of electron-specimen interations. different imaging and analytical modes utilizing secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling results, and cathodoluminescence are mentioned to judge particular contrasts and to procure quantitative information.
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Additional info for Scanning Electron Microscopy: Physics of Image Formation and Microanalysis
Example text
In practice, it is more important to know the dependence of probe diameter on the focal length or the working distance w, which can be continuously varied, and for a discrete set of final apertures. 25). 17) and as j, respectively (see also Fig. 10). 29) shows that the last two terms, which contain C s and C c are approximately independent of j or W whereas the first term is proportional to j2 for a constant probe current Ip. 5 Wave-Optical Theory of Electron-Probe Formation The foregoing geometric-optical treatment of lens aberrations is adequate for the discussion in Sect.
Min_ Fig. 15. Maximum electronprobe current Ip,max plotted against the minimum diameter dp,min for thermionic and fieldemission cathodes 34 2. Electron Optics of a Scanning Electron Microscope has to be calculated wave-optically (Sect. 5). 68] is found to be 2/3 Ip,max = C dp,min . 33) The constant c depends strongly on the spherical aberration of the electrode system in the gun (triode or tetrode) and on the presence of a further magnetic condenser lens. 32) (Fig. 15). Lm. Lm, a thermionic gun can provide a higher probe current, which is a valuable feature for x-ray and Auger electron microanalysis and in the specimen-current, cathodoluminescence, and acoustic thermal-wave microscopy, for example.
If C s of. 0 and hence W of. 0, the phase factor can be split into real and imaginary parts by Euler's formula exp(iB) = cosB + i sinB and the probability density, which is proportional to the local current density j(r), becomes 2. Electron Optics of a Scanning Electron Microscope 36 Fig. 16. 1 mm). 1. 0 a. 1. 2 2 I. 8 6